top of page
Search

Introducing the Next Generation of Plasma & PVD Solutions from Compact Plasma Europe AB (a Nanovac subsidiary)

We’re excited to share major news from Compact Plasma Europe AB—your gateway to advanced, accessible plasma and vacuum technologies backed by Nanovac AB. Building on our core strengths in plasma etch and deposition equipment, our portfolio now spans:


  1. Full-Featured PVD Systems (sputter, resistive, e-beam)

  2. Open-Load RIE & PECVD (nanoRIE 305/350 and nanoPECVD 305/350)

  3. 300 mm load locked ALE/ICP/RIE platform


Open-Load RIE (nanoRIE 305 & nanoRIE 350)

  • Dielectric Etch Focus: Delivers industry-leading uniformity and selectivity using fluorine-based chemistries

  • Compact & Scalable: Fits seamlessly into labs with minimal footprint, yet accommodates wafers up to 300 mm (on the 350 model)

  • Ideal for Failure Analysis: A go-to tool for yield and defect investigation in both R&D and production environments


Open-Load PECVD (nanoPECVD 305 & nanoPECVD 350)

  • High-Uniformity Deposition: Consistent film coverage for sensor fabrication, MEMS, and beyond

  • Flexible Chamber Design: Quickly switch among different materials and gas lines without major retooling

  • Streamlined Integration: Engineered for ease of installation, from small labs to pilot production setups


300 mm ALE/ICP/RIE Platform

  • Atomic-Level Precision: Achieve sub-nanometer etch or deposition for next-generation semiconductor research

  • Wafer Size Versatility: Handles up to 300 mm substrates—ideal for both small-scale prototyping and advanced pilot lines

  • Advanced Process Control: Leverages sophisticated software architecture for tight parameter regulation


Why Compact Plasma?

  • Leading Performance, Accessible CostWe streamline engineering and use tier-one components to offer high-end process capability without the premium price tag.

  • Advanced Control & Data LoggingEvery platform integrates Rockwell Automation PLC technology, enabling powerful recipe management, extensive data logging, and remote connectivity.

  • Global Support & Deep ExpertiseAs part of Nanovac AB, we provide worldwide field service, training, and process consulting—ensuring your systems remain productive and at peak performance over the long run.

Experience the Future of Plasma & PVD

If you’re ready to enhance your lab’s capabilities or scale up to pilot production, we invite you to explore our full range of plasma etch, PECVD, and PVD solutions. Whether you need atomic-level precision, flexible deposition, or robust hardware, Compact Plasma has a system to fit your requirements—and your budget.



We look forward to partnering with you on your next project. Stay tuned for more updates and demos—together, let’s redefine the boundaries of plasma technology.


Best regards,

The Compact Plasma Europe AB Team

(A Nanovac AB Subsidiary)

 
 
 

Comments

bottom of page