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Introducing the NanoPVDRD: The Future of PVD Technology for R&D and Academia


We are thrilled to announce the launch of our latest innovation in Physical Vapor Deposition (PVD) technology: the NanoPVDRD. Built on our award-winning CompactPlasma platform, this cutting-edge system is designed to meet the rigorous demands of R&D labs and academic institutions while offering a competitive price and a compact footprint.

Key Features:

  • Versatile Magnetron: Equipped with a default 3" magnetron, the system can easily be upgraded to accommodate up to 8" wafers, making it suitable for a wide range of applications.

  • Advanced Substrate Handling: The default configuration supports 4" wafers, with the flexibility to handle up to 8" wafers for larger projects.

  • Precision Thin Film Monitoring: Our closed-loop thin film monitor system ensures unparalleled precision and control, delivering consistent and reliable results every time.

  • High-Performance Pumping: Featuring a close-coupled 260 l/s turbo pump, the platform offers rapid pump-down times and superior vacuum performance.

  • User-Friendly Design: The easy-access front door allows for quick and convenient loading and unloading of substrates, minimizing downtime and maximizing productivity.


Why Choose NanoPVDRD?


  1. Compact and Efficient: Perfect for space-constrained labs, the NanoPVDRD boasts a compact design without compromising on performance.

  2. Cost-Effective: Designed with budget-conscious R&D and academic users in mind, it offers top-tier capabilities at a competitive price point.

  3. Superior Software: Powered by Nanovac/CompactPlasma's award-winning software and control solutions, users can expect intuitive operation and advanced functionality.

  4. Reliable and Robust: Built with tier 1 OEM components, the NanoPVDRD ensures longevity and reliable performance, making it a sound investment for any research facility.


Join the forefront of PVD innovation with the NanoPVDRD. Elevate your research capabilities and achieve unparalleled results with our latest CompactPlasma-powered solution.


Discover More: To learn more about the NanoPVDRD and how it can benefit your research, visit our website or contact our sales team for a personalized demonstration.

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